The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
Oct. 30, 2008
Richard Morton, San Diego, CA (US);
Yoshiho Amada, San Diego, CA (US);
Richard Morton, San Diego, CA (US);
Yoshiho Amada, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A method for making a metal fluoride trap including: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the metal fluoride trap. A method of filtering gas in a metal fluoride trap is also disclosed. A metal fluoride trap apparatus is also disclosed.