The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Jun. 26, 2008
Tillmann Ehrenberg, Schoeffengrund, DE;
Uwe Goetz, Braunfels-Neukirchen, DE;
Guenter Schieferstein, Huettenberg, DE;
Tillmann Ehrenberg, Schoeffengrund, DE;
Uwe Goetz, Braunfels-Neukirchen, DE;
Guenter Schieferstein, Huettenberg, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
A device for measuring positions of structures () on a substrate () is disclosed, wherein the device is enclosed by a climatic chamber (). An illumination and imaging means () is also arranged in the climatic chamber (). At least one loading station () for substrates is formed on an outer wall () of the climatic chamber (), wherein at least one transport means () for transporting the substrates is provided within the climatic chamber (). A means () for orienting the substrates () with respect to a coordinate system of the coordinate measuring machine () is provided, wherein the transport means () deposits the substrates () on the means () for orienting.