The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Jul. 28, 2006
Ken-ichi Tada, Fujisawa, JP;
Koichiro Inaba, Shunan, JP;
Taishi Furukawa, Ayase, JP;
Tetsu Yamakawa, Tokyo, JP;
Noriaki Oshima, Yokohama, JP;
Ken-ichi Tada, Fujisawa, JP;
Koichiro Inaba, Shunan, JP;
Taishi Furukawa, Ayase, JP;
Tetsu Yamakawa, Tokyo, JP;
Noriaki Oshima, Yokohama, JP;
Tosoh Corporation, Shunan-Shi, JP;
Sagami Chemical Research Center, Ayase-Shi, JP;
Abstract
A compound which has thermal stability and moderate vaporizability and is satisfactory as a material for the CVD or ALD method; a process for producing the compound; a thin film formed from the compound as a raw material; and a method of forming the thin film. A compound represented by the general formula (1) is produced by reacting a compound represented by the general formula (2) with a compound represented by the general formula (3). The compound produced is used as a raw material to form a metal-containing thin film. [Chemical formula 1] (1) [Chemical formula 2] (2) [Chemical formula 3] M(NRR)(3) (In the formulae, M represents a Group 4 element, aluminum, gallium, etc.; n is 2 or 3 according to cases; Rand Reach represents Calkyl, etc.; Rrepresents Calkyl, etc.; Rand Reach represents Calkyl, etc.; X represents hydrogen, lithium, or sodium; p is 1 or 2 according to cases; and q is 4 or 6 according to cases).