The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Oct. 25, 2006
Hideaki Nonaka, Tokyo, JP;
Kenji Kobayashi, Tokyo, JP;
Hideaki Nonaka, Tokyo, JP;
Kenji Kobayashi, Tokyo, JP;
Lintec Corporation, Tokyo, JP;
Abstract
A sheet sticking apparatuscomprises a sheet feed-out unitthat feeds out an adhesive sheet S to a position facing a surface of a semiconductor wafer W and a press rollerthat presses the adhesive sheet S to stick the adhesive sheet S onto the wafer W. The sheet feed-out unitincludes a tension measuring meansfor measuring a tension of the adhesive sheet S between the sheet feed-out unitand the press rollerand a sticking angle maintaining meansprovided with a feed-out headfor maintaining a sticking angle θ. After measuring and adjusting the tension immediately before sticking the adhesive sheet S, the feed-out headis lowered in proportion to the movement amount of the press roller, thereby the sticking angle θ is maintained, and thus the tension is maintained at a constant level.