The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Mar. 27, 2008
Cécile Moulin, Seyssinet Pariset, FR;
Sophie Moritz, Grenoble, FR;
Philippe Gastaldo, Pontcharra, FR;
François Berger, Saint Chef, FR;
Jean-luc Delcarri, Saint Ismier, FR;
Patrice Belin, Auxerre, FR;
Christophe Maleville, La Terrasse, FR;
Cécile Moulin, Seyssinet Pariset, FR;
Sophie Moritz, Grenoble, FR;
Philippe Gastaldo, Pontcharra, FR;
François Berger, Saint Chef, FR;
Jean-Luc Delcarri, Saint Ismier, FR;
Patrice Belin, Auxerre, FR;
Christophe Maleville, La Terrasse, FR;
S.O.I. Tec Silicon on Insulator Technologies, Bernin, FR;
Altatech Semiconductor, Montbonnot Saint Martin, FR;
Abstract
A method for detecting surface defects, such as slip line type defects, on a substrate designed to be used in electronics, optoelectronics or analogue, including projection of a pattern of light fringes and dark bands onto the substrate, relative displacement of the substrate relative to the pattern, acquisition of a sequence of at least three images of the pattern reflected by the substrate to a sensor, the images corresponding to displacement of the fringes of the pattern, determination of the gradient of the surface of the substrate using displacements of fringes of the pattern, and determination of the presence of a surface defect on the substrate using variations in the gradient of the surface of the substrate. Another embodiment comprises a device using said method.