The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Mar. 21, 2005
Theodorus Leonardus Van Den Akker, Valkenswaard, NL;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Marco Cornelis Jacobus Martinus Van Hassel, Zundert, NL;
Frank Anton Morselt, Eersel, NL;
Theodorus Leonardus Van Den Akker, Valkenswaard, NL;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Marco Cornelis Jacobus Martinus Van Hassel, Zundert, NL;
Frank Anton Morselt, Eersel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method and device for programming an array of individually controllable elements configured to impart a beam with a pattern. For example, the method can be suitable for use in a lithographic apparatus. The method includes generating first data representing a first pattern, generating second data representing a second pattern, writing the first data to a first buffer, and reading the first data from the first buffer to program the array of individually controllable elements to display the first pattern, while writing the second data to a second buffer in parallel.