The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Aug. 29, 2007
Applicants:
Kenji Nakamura, Iga, JP;
Hisashi Shiraiwa, Koka, JP;
Inventors:
Kenji Nakamura, Iga, JP;
Hisashi Shiraiwa, Koka, JP;
Assignee:
Otsuka Electronics Co., Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 1/00 (2006.01); G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is an aperture variable inspection optical system including a variable aperture unithaving a polygonal light transparent section and light collecting systemsfor forming an irradiation spot U of light passing through the variable aperture unitat the position of a sample S. The variable aperture unitis capable of changing the shape/size of the polygon. The size of the irradiation spot U can be changed without rearranging the aperture unit.