The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 05, 2010

Filed:

Oct. 05, 2006
Applicants:

Yue-shiun Lee, Taipei, TW;

Cheng-hsiung Chen, Taipei, TW;

Tsz-hui Kuo, Hsinchu, TW;

Inventors:

Yue-Shiun Lee, Taipei, TW;

Cheng-Hsiung Chen, Taipei, TW;

Tsz-Hui Kuo, Hsinchu, TW;

Assignee:

United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/26 (2006.01); H01L 23/58 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
Abstract

A radio frequency test key structure includes a substrate, a bottom metal layer and a top metal layer. A narrow testing region is defined on the substrate. The bottom metal layer is positioned on the substrate and in the narrow testing region, and including an opening to expose parts of a device under test. The top metal layer is a metal pad in a sheet form, positioned in the narrow testing region and on the bottom metal layer. At least two signal pad regions and at least two ground pad regions are defined in the top metal layer. The signal pad regions and the ground pad regions are arranged in one row, and the row is parallel to the narrow testing region. Accordingly, the radio frequency test key structure can be positioned in a scribe line, and get an accurate testing result.


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