The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Jan. 02, 2008
Gregory Robert Alcott, West Sussex, GB;
Adrian Murrell, West Sussex, GB;
Matthew Castle, Morgan Hill, CA (US);
Martin Hilkene, Gilroy, CA (US);
Gregory Robert Alcott, West Sussex, GB;
Adrian Murrell, West Sussex, GB;
Matthew Castle, Morgan Hill, CA (US);
Martin Hilkene, Gilroy, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Components in an ion implanter that may see incidence of the ion beam include a chamber having an elongate slot opening defined by edges so that a central portion of the ion beam enters the component through the opening with the edges clipping at least a peripheral portion of the ion beam. The arrangement mitigates the problem of sputtered material escaping back out from the component and becoming entrained in the ion beam.