The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Nov. 17, 2005
Masayuki Nishiwaki, Yoshikawa, JP;
Junichiro Iri, Yokohama, JP;
Genji Inada, Kawasaki, JP;
Sadayuki Sugama, Tsukuba, JP;
Masayuki Nishiwaki, Yoshikawa, JP;
Junichiro Iri, Yokohama, JP;
Genji Inada, Kawasaki, JP;
Sadayuki Sugama, Tsukuba, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A laser processing apparatus, in accordance with at least one exemplary embodiment, is configured to contemporaneously perform the functions of observing a surface of a substrate and concentrating laser light to a given position inside the substrate. The laser processing apparatus can include an optical system having an afocal optical subsystem configured to concentrate laser light inside the substrate. Adjustment of the position of a laser light concentrating point can be achieved independent of adjustment of a focal point by the automatic focusing mechanism to observe the surface of the substrate irradiated with laser light.