The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2010
Filed:
Nov. 17, 2008
Dileep Agnihotri, Round Rock, TX (US);
Jeremy O'dell, Manor, TX (US);
Isaac Mazor, Haifa, IL;
Boris Yokhin, Nazareth Illit, IL;
Dileep Agnihotri, Round Rock, TX (US);
Jeremy O'Dell, Manor, TX (US);
Isaac Mazor, Haifa, IL;
Boris Yokhin, Nazareth Illit, IL;
Jordan Valley Semiconductors Ltd., Migdal Ha'emek, IL;
Abstract
A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.