The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2010
Filed:
Dec. 18, 2008
Applicants:
Andreas Seifert, Aalen, DE;
Markus Weiss, Aalen, DE;
Andreas Heisler, Steinheim, DE;
Stefan Dornheim, Heindenheim, DE;
Inventors:
Andreas Seifert, Aalen, DE;
Markus Weiss, Aalen, DE;
Andreas Heisler, Steinheim, DE;
Stefan Dornheim, Heindenheim, DE;
Assignee:
Carl Zeiss SMT AG, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.