The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Jul. 27, 2007
Applicants:
Vincent Fortin, Bromont, CA;
Luc Ouellet, Granby, CA;
Inventors:
Vincent Fortin, Bromont, CA;
Luc Ouellet, Granby, CA;
Assignee:
DALSA Semiconductor Inc., Waterloo, Ontario, CA;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A structural film, typically of silicon, in MEMS or NEMS devices is fabricated by depositing the film in the presence of a gas other than nitrogen, and preferably argon as the carrier gas.