The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Apr. 20, 2005
Applicants:
Kenji Kobayashi, Tokyo, JP;
Masaki Tsujimoto, Tokyo, JP;
Takahisa Yoshioka, Tokyo, JP;
Inventors:
Assignee:
Lintec Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); B32B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wafer W is supported on the rear surface side thereof by a ring frame R by means of a dicing tape T, and a protection tape H is stuck on the front surface side the wafer W. A suction unitincludes a tablehaving a suction facein the upper face. The suction facesucks the dicing tape T to hold the wafer W through performing a predetermined suction. At least in a partial area along the periphery of the suction face, a grooveis formed. By sucking through the suction face, the inside of the groovebecomes negative pressure and the dicing tape T is sunk therein.