The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Dec. 26, 2007
Applicants:
Kiwamu Takehisa, Kanagawa, JP;
Haruhiko Kusunose, Kanagawa, JP;
Naoki Awamura, Kanagawa, JP;
Inventors:
Assignee:
Lasertec Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 3/00 (2006.01); G02B 9/00 (2006.01); G02B 1/06 (2006.01); G02B 3/12 (2006.01); G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
According to one aspect of the present invention, there is provided a photomask inspection apparatus which observes a pattern provided on a mask substrate of a mask to inspect the mask including an object lens, and a liquid that is present between a last lens in the side closer to the mask of the object lens and the mask.