The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Oct. 15, 2006
Arie Glazer, Mevaseret Zion, IL;
Ilya Leizerson, Haifa, IL;
Abraham Gross, Ramat Aviv, IL;
Raanan Adin, Kiryat Ono, IL;
Raphael Ben-tolila, Kiryat Gat, IL;
Arie Glazer, Mevaseret Zion, IL;
Ilya Leizerson, Haifa, IL;
Abraham Gross, Ramat Aviv, IL;
Raanan Adin, Kiryat Ono, IL;
Raphael Ben-Tolila, Kiryat Gat, IL;
Orbotech Ltd, Yavne, IL;
Abstract
An apparatus is provided for testing microelectronic components on a substrate, including a scanner operative to scan a light beam over a plurality of thin film transistors disposed on a substrate, one transistor at a time, so as to induce a photoconductive response in the plurality of transistors, one transistor at a time; current sensing circuitry operative, synchronously with said scanner, to measure an output induced by the photoconductive response associated with a transistor and to generate photoconductive response output values, the photoconductive response output values representing a photoconductive response induced by the light beam, for one transistor at a time from among the plurality of transistors; and diagnostic apparatus operative to analyze the electronic response output values and to characterize each of the transistors in accordance therewith.