The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Jan. 20, 2005
Kevin H.-l. Chau, Andover, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
John A. Geen, Tewksbury, MA (US);
Michael W. Judy, Wakefield, MA (US);
John R. Martin, Foxborough, MA (US);
Kevin H.-L. Chau, Andover, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
John A. Geen, Tewksbury, MA (US);
Michael W. Judy, Wakefield, MA (US);
John R. Martin, Foxborough, MA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
A sensor element is capped by bonding or otherwise forming a cap on a sensor element. The sensor may be hermetically sealed by using a hermetic cap and hermetic bonding material or by applying a hermetic coating. The sensor may be filled with a gas at an elevated pressure. The sensor may alternatively or additionally be filled with a special gas, such as a gas having a density-to-viscosity ratio above approximately 0.2.