The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2010

Filed:

Nov. 26, 2008
Applicants:

Yoshimichi Sogawa, Tokyo, JP;

Takao Yamazaki, Tokyo, JP;

Masahiko Sano, Tokyo, JP;

Seiji Kurashina, Tokyo, JP;

Yuji Akimoto, Tokyo, JP;

Inventors:

Yoshimichi Sogawa, Tokyo, JP;

Takao Yamazaki, Tokyo, JP;

Masahiko Sano, Tokyo, JP;

Seiji Kurashina, Tokyo, JP;

Yuji Akimoto, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A vacuum package has a chamber in which pressure is reduced to less than the atmospheric pressure, a functional component sealed in the chamber, and a material forming at least a part of the chamber. The material has at least one through hole to evacuate the chamber. In a cross section perpendicular to the material taken along the through hole, an edge portion of the material forming the through hole has an obtuse angle. The through hole is sealed with a sealing material.


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