The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Oct. 11, 2007
Applicants:
Tadahiro Ohmi, Sendai-Shi, Miyagi 980-0813, JP;
Shigetoshi Sugawa, Sendai, JP;
Katsuyuki Sekine, Sendai, JP;
Yuji Saito, Sendai, JP;
Inventors:
Tadahiro Ohmi, Sendai-Shi, Miyagi 980-0813, JP;
Shigetoshi Sugawa, Sendai, JP;
Katsuyuki Sekine, Sendai, JP;
Yuji Saito, Sendai, JP;
Assignees:
Other;
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes a Si crystal having a crystal surface in the vicinity of a (111) surface, and an insulation film formed on said crystal surface, at least a part of said insulation film comprising a Si oxide film containing Kr or a Si nitride film containing Ar or Kr.