The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Aug. 14, 2006
Neal R. Rueger, Boise, ID (US);
Mark J. Williamson, Boise, ID (US);
Gurtej S. Sandhu, Boise, ID (US);
Justin R. Arrington, Boise, ID (US);
Neal R. Rueger, Boise, ID (US);
Mark J. Williamson, Boise, ID (US);
Gurtej S. Sandhu, Boise, ID (US);
Justin R. Arrington, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
Methods and apparatus may operate to position a sample, including an imager lens surface, within a processing chamber. Further activities may include creating a layer of reactive material in proximity with the imager lens surface, and exciting a portion of the layer of reactive material in proximity with the imager lens surface to form chemical radicals. Additional activities may include removing a portion of the material in proximity to the excited portion of the imager lens surface to a predetermined level, and continuing the creating, exciting and removing actions until at least one of a plurality of stop criteria occurs.