The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Mar. 31, 2008
Applicants:
Marek Uncovsky, Brno, CZ;
Milos Toth, Portland, OR (US);
William Ralph Knowles, Forest Grove, OR (US);
Inventors:
Marek Uncovsky, Brno, CZ;
Milos Toth, Portland, OR (US);
William Ralph Knowles, Forest Grove, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/252 (2006.01);
U.S. Cl.
CPC ...
Abstract
A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.