The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Mar. 17, 2006
Arnaud Favre, Annecy, FR;
Remi Thollot, Cruseilles, FR;
Xavier Metais, Meythet, FR;
Jean-pierre Desbiolles, Cruseilles, FR;
Francoise Desbiolles, Legal Representative, Cruseilles, FR;
Arnaud Favre, Annecy, FR;
Remi Thollot, Cruseilles, FR;
Xavier Metais, Meythet, FR;
Jean-Pierre Desbiolles, Cruseilles, FR;
Francoise Desbiolles, legal representative, Cruseilles, FR;
Alcatel, Paris, FR;
Abstract
A device is used to measure contamination directly in transport enclosures of FOUP or SMIF type, for example. The transport enclosure is placed on an adapter that sets up direct communication between it and an external gas analyzer. The gas analyzer ionizes the sampled gases and performs the analysis by measuring a parameter of the ions resulting from this ionization. This measures very low levels of gaseous contamination in real time.