The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 31, 2010

Filed:

Feb. 12, 2008
Applicants:

Yoshitaka Hamada, Joetsu, JP;

Fujio Yagihashi, Joetsu, JP;

Takeshi Asano, Joetsu, JP;

Hideo Nakagawa, Shiga, JP;

Masaru Sasago, Osaka, JP;

Inventors:

Yoshitaka Hamada, Joetsu, JP;

Fujio Yagihashi, Joetsu, JP;

Takeshi Asano, Joetsu, JP;

Hideo Nakagawa, Shiga, JP;

Masaru Sasago, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract

In the invention, a silica sol prepared by hydrolyzing and condensing a silane compound represented by the following formula: Si(OR)or RSi(OR)wherein Rs, R(s) and R(s) may be the same or different when a plurality of them are contained in the molecule and each independently represents a linear or branched Calkyl group in the presence of a hydrophilic basic catalyst and a hydrophobic basic catalyst is used for a conventional porous-film forming composition.


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