The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
Feb. 23, 2006
John S. Foster, Santa Barbara, CA (US);
Paul J. Rubel, Santa Barbara, CA (US);
Kimon Rybnicek, Santa Barbara, CA (US);
Paulo Silveira Da Motta, Santa Barbara, CA (US);
John S. Foster, Santa Barbara, CA (US);
Paul J. Rubel, Santa Barbara, CA (US);
Kimon Rybnicek, Santa Barbara, CA (US);
Paulo Silveira da Motta, Santa Barbara, CA (US);
Innovative Micro Technology, Goleta, CA (US);
Abstract
A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable feature is formed using a dry etch process. Since the moveable feature is free to move upon its formation using the dry etch process, no stiction issues arise using the systems and methods described here.