The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
Jan. 22, 2007
Pejman Fani, San Diego, CA (US);
Mark Rouillard, Mission Viejo, CA (US);
John Korbler, Mertztown, PA (US);
James Brown, Jim Thorpe, PA (US);
Chad Hosack, Tigard, OR (US);
Pejman Fani, San Diego, CA (US);
Mark Rouillard, Mission Viejo, CA (US);
John Korbler, Mertztown, PA (US);
James Brown, Jim Thorpe, PA (US);
Chad Hosack, Tigard, OR (US);
Abstract
A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.