The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Mar. 26, 2008
Applicants:
Boris Habets, Dresden, DE;
Michiel Kupers, Dresden, DE;
Inventors:
Boris Habets, Dresden, DE;
Michiel Kupers, Dresden, DE;
Assignee:
Qimonda AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 37/00 (2006.01); G01C 17/38 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and systems of alternative overlay calculation and of calculating overlay stability based on alternative overlay settings in a fabrication unit, and a computer readable medium are disclosed being capable of calculating alternative overlay error values based on alignment model parameters, alternative alignment model parameters, and overlay error values for a plurality of measurement positions.