The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Aug. 23, 2006
Ronald Stevens, San Ramon, CA (US);
Brendan Mcdougall, Livermore, CA (US);
Jacob W. Smith, Santa Clara, CA (US);
Garry Kwong, San Jose, CA (US);
Sandeep Nijhawan, Los Altos, CA (US);
Lori D. Washington, Union City, CA (US);
Ronald Stevens, San Ramon, CA (US);
Brendan McDougall, Livermore, CA (US);
Jacob W. Smith, Santa Clara, CA (US);
Garry Kwong, San Jose, CA (US);
Sandeep Nijhawan, Los Altos, CA (US);
Lori D. Washington, Union City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods are disclosed of determining a fill level of a precursor in a bubbler. The bubbler is fluidicly coupled with a substrate processing chamber through a vapor-delivery system. The bubbler and vapor-delivery system are backfilled with a known dose of a backfill gas. A pressure and temperature of the backfill gas are determined, permitting a total volume for the backfill gas in the bubbler and vapor-delivery system to be determined by application of a gas law. The fill level of the precursor in the bubbler is determined as a difference between (1) a total volume of the bubbler and vapor-delivery system and (2) the determined total volume for the backfill gas.