The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Mar. 12, 2008
Hiroshi Morita, Mito, JP;
Ryozo Takeuchi, Hitachi, JP;
Ayumu Hatanaka, Tokai, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A charged particle beam apparatus in which discharge is less likely to occur between a charged particle source, and an extraction electrode, and an acceleration electrode without the need for increasing the capacity of a high voltage power supply for extraction. The charged particle beam apparatus includes a charged particle source which emits charged particles, an extraction electrode which extracts the charged particles from the charge particle source and an acceleration electrode which accelerates the extracted charged particles. A surge absorber is electrically connected between at least two of the charged particle source, the extraction electrode, and the acceleration electrode.