The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Jan. 11, 2006
Applicants:
Tatsuya Sakai, Chuo-ku, JP;
Yasuo Matsuki, Chuo-ku, JP;
Inventors:
Tatsuya Sakai, Chuo-ku, JP;
Yasuo Matsuki, Chuo-ku, JP;
Assignee:
JSR Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
A trench embedding method comprising the steps of According to this method, even when aluminum is embedded into trenches having a fine and complex pattern, embedding performance is high and trenches in a large substrate can filled. This method can be carried out at a low cost.