The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Jun. 09, 2008
Takeshi Iwai, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Kyoko Ohshita, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Komei Hirahara, Kawasaki, JP;
Yuichi Suzuki, Kawasaki, JP;
Takehiro Seshimo, Kawasaki, JP;
Takeshi Iwai, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Kyoko Ohshita, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Komei Hirahara, Kawasaki, JP;
Yuichi Suzuki, Kawasaki, JP;
Takehiro Seshimo, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A compound represented by general formula (b-14); and acid generator consisting of the compound; and a resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1-14): wherein R″ to R″ each independently represents an aryl group or an alkyl group, wherein two of R″ to R″ may be bonded to each other to form a ring with the sulfur atom, and at least one of R″ to R″ represents a substituted aryl group in which a portion or all of the hydrogen atoms are substituted with an alkoxyalkyloxy group or an alkoxycarbonylalkyloxy group; and Xrepresents an anion.