The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7772866 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 10, 2010

Filed:

Mar. 07, 2007
Applicants:

Oliver D. Patterson, Poughkeepsie, NY (US);

Horatio Seymour Wildman, Wappingers Falls, NY (US);

Min-chul Sun, Gyeonggi-do, KR;

Inventors:

Oliver D. Patterson, Poughkeepsie, NY (US);

Horatio Seymour Wildman, Wappingers Falls, NY (US);

Min-Chul Sun, Gyeonggi-do, KR;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

Embodiments of the present invention provide a test structure for inspection of integrated circuits. The test structure may be fabricated on a semiconductor wafer together with one or more integrated circuits. The test structure may include a common reference point for voltage reference; a plurality of voltage dropping devices being connected to the common reference point; and a plurality of electron-collecting pads being connected, respectively, to a plurality of contact points of the plurality of voltage dropping devices. A brightness shown by the plurality of electron-collecting pads during an inspection of the integrated circuits may be associated with a pre-determined voltage.


Find Patent Forward Citations

Patterson, Oliver. (2010). Structure and method of mapping signal intensity to surface voltage for integrated circuit inspection (U.S. Patent No. 7772866). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7772866

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