The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Jul. 15, 2005
Hironobu Umemoto, Nomi, JP;
Atsushi Masuda, Nomi, JP;
Koji Yoneyama, Nomi, JP;
Keiji Ishibashi, Kawasaki, JP;
Manabu Ikemoto, Kawasaki, JP;
Hironobu Umemoto, Nomi, JP;
Atsushi Masuda, Nomi, JP;
Koji Yoneyama, Nomi, JP;
Keiji Ishibashi, Kawasaki, JP;
Manabu Ikemoto, Kawasaki, JP;
Canon Anelva Corporation, Kawasaki-Shi, Kanagawa, JP;
Abstract
In a hydrogen atom generation source in a vacuum treatment apparatus which can effectively inhibit hydrogen atoms from being recombined due to contact with an internal wall surface of a treatment chamber of the vacuum treatment apparatus and an internal wall surface of a transport passage, and being returned into hydrogen molecules, at least a part of a surface facing a space with the hydrogen atom generation source formed therein of a member surrounding the hydrogen atom generation source is coated with SiO. In a hydrogen atom transportation method for transporting hydrogen atoms generated by the hydrogen atom generation source in the vacuum treatment apparatus to a desired place, the hydrogen atoms are transported via a transport passage whose internal wall surface is coated with SiO.