The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Oct. 30, 2007
Masatoshi Yasutake, Chiba, JP;
Takeshi Umemoto, Chiba, JP;
Masatoshi Yasutake, Chiba, JP;
Takeshi Umemoto, Chiba, JP;
SII NanoTechnology Inc., Chiba, JP;
Abstract
There is provided a sample operation apparatus in which, by a static electricity force acting between a probe and a sample, an accurate position is gripped without the sample being moved, and the sample can be operated by the probe for an observation, a grip, a release, or the like. There is made such that an AC electric source applying an AC voltage to an observation probe having in its tip and a bias electric source applying a DC voltage are connected, a bias electric source applying the DC voltage a grip probe adjoining the observation probe is possessed, there is relatively moved by a scanner in a plane (XY) direction in regard to a substrate fixed to a sample base, a vibration of the observation probe, which occurs by a static electricity between the tip and the substrate or the sample on the substrate, or the like, is detected by a lock-in amplifier through a displacement detection means, there is applied to the observation probe by the bias electric source such that the vibration becomes small by a feedback circuit, and there is applied also to the grip probe similarly by the bias electric source.