The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Nov. 14, 2006
Bruce W. Smith, Penfield, NY (US);
Bruce W. Smith, Penfield, NY (US);
Other;
Abstract
Aberrations in an optical system can be detected and measured using a method comprised of a test target in the object plane of a projection system and imaging onto the image plane with the system. The test target comprises at least one open figure which comprises a multiple component array of phase zones, where the multiple zones are arranged within the open figure so that their response to lens aberration is interrelated and the zones respond uniquely to specific aberrations depending on their location within the figure. This is a unique and new method of detecting a variety of aberration types including coma, spherical, astigmatism, and three-point through the imaging onto photosensitive material or image detector placed in the image plane of the system and the evaluation of these images. The method of the invention offers an advantage over other methods because of the sensitivity to particular aberration types, the unique response of the multiple zones of the test target to aberrations, and the ease with which aberrations can be distinguished.