The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Mar. 10, 2009
Gregory A. Carlson, Santa Barbara, CA (US);
John S. Foster, Santa Barbara, CA (US);
Christopher S. Gudeman, Lompoc, CA (US);
Paul J. Rubel, Santa Barbara, CA (US);
Gregory A. Carlson, Santa Barbara, CA (US);
John S. Foster, Santa Barbara, CA (US);
Christopher S. Gudeman, Lompoc, CA (US);
Paul J. Rubel, Santa Barbara, CA (US);
Innovative Micro Technology, Goleta, CA (US);
Abstract
A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.