The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Nov. 17, 2006
Minoru Ametani, Hachioji, JP;
Minoru Ametani, Hachioji, JP;
Tokyo Seimitsu Co., Ltd., Mitaka-shi, JP;
Abstract
In a peeling tape attaching apparatus for attaching a peeling tape () on a surface protective film () attached on the surface of a wafer (), the wafer is supported on a movable table () with the surface protective film up and the peeling tape is supplied on the surface protective film of the wafer. The movable table is moved in such a manner that an end () of the wafer is located under a peeling tape attaching unit (), and pressure is exerted by pressing the peeling tape attaching unit against the surface protective film of the wafer via the peeling tape. After that, the movable table is moved toward the other end () of the wafer, and upon movement of the movable table, by a predetermined distance, from the peeling tape attaching unit, the pressure is canceled.