The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Oct. 11, 2005
Sebastiaan Maria Johannes Cornelissen, Eindhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Cornelis Christiaan Ottens, Veldhoven, NL;
Peter Smits, Baarlo, NL;
Johannes Antonius Maria Van DE Wal, Oirschot, NL;
Sebastiaan Maria Johannes Cornelissen, Eindhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Cornelis Christiaan Ottens, Veldhoven, NL;
Peter Smits, Baarlo, NL;
Johannes Antonius Maria Van De Wal, Oirschot, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is disclosed in which a circular sensor is mounted to a substrate table with three leaf springs that are evenly spaced around a thermal axis of the sensor. The leaf springs are provided in two parts that are releasably attachable to each other. The leaf springs are elastic and allow some movement of the sensor relative to the substrate table on thermal expansion and contraction but ensure that the thermal center of the sensor does not move relative to the substrate table.