The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Jan. 04, 2007
Knud Reuter, Krefeld, DE;
Jörg Sundermeyer, Marburg, DE;
Alexei Merkoulov, Moskau, RU;
Wolfgang Stolz, Marburg, DE;
Kestin Volz, Dautphetal, DE;
Michael Pokoj, Fernwald, DE;
Thomas Ochs, Kirchheim-Betziesdorf, DE;
Knud Reuter, Krefeld, DE;
Jörg Sundermeyer, Marburg, DE;
Alexei Merkoulov, Moskau, RU;
Wolfgang Stolz, Marburg, DE;
Kestin Volz, Dautphetal, DE;
Michael Pokoj, Fernwald, DE;
Thomas Ochs, Kirchheim-Betziesdorf, DE;
H. C. Starck Clevios GmbH, Goslar, DE;
Abstract
The present invention relates to specific novel tungsten and molybdenum compounds to the use thereof for the deposition of tungsten- or molybdenum-containing layers by means of chemical vapour deposition, and to the tungsten- or molybdenum-containing layers produced by this process.