The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2010
Filed:
Jan. 18, 2006
Lawrence F. Mchugh, North Andover, MA (US);
Prabhat Kumar, Framingham, MA (US);
David Meendering, Coldwater, MI (US);
Richard Wu, Chelmsford, MA (US);
Gerhard Wötting, Coburg, DE;
Richard Nicholson, Chardon, OH (US);
Lawrence F. McHugh, North Andover, MA (US);
Prabhat Kumar, Framingham, MA (US);
David Meendering, Coldwater, MI (US);
Richard Wu, Chelmsford, MA (US);
Gerhard Wötting, Coburg, DE;
Richard Nicholson, Chardon, OH (US);
H.C. Starck Inc., Newton, MA (US);
Abstract
The invention relates to high purity MoOpowder by reduction of ammonium molybdate or molybdenum trioxide using hydrogen as the reducing agent in a rotary or boat furnace. Consolidation of the powder by press/sintering, hot pressing, and/or HIP is used to make discs, slabs, or plates, which are used as sputtering targets. The MoOdisc, slab, or plate form is sputtered on a substrate using a suitable sputtering method or other physical means to provide a thin film having a desired film thickness. The thin films have properties such as electrical, optical, surface roughness, and uniformity comparable or superior to those of indium-tin oxide (ITO) and zinc-doped ITO in terms of transparency, conductivity, work function, uniformity, and surface roughness. The MoOand MoOcontaining thin films can be used in organic light-emitting diodes (OLED), liquid crystal display (LCD), plasma display panel (PDP), field emission display (FED), thin film solar cell, low resistivity ohmic contacts, and other electronic and semiconductor devices.