The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Aug. 02, 2005
Fransiscus Godefridus Casper Bijnen, Valkenswaard, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Fransiscus Godefridus Casper Bijnen, Valkenswaard, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic substrate provided with an alignment mark, the alignment mark having a plurality of features spaced apart from one another, each feature being spaced apart from adjacent features by a different distance is disclosed. Further, there is disclosed a method of aligning a lithographic substrate provided with an alignment mark which has a plurality of features spaced apart from one another, each feature being spaced apart from adjacent features by a different distance, the method including measuring a distance between two of the features on the substrate, comparing the distance with a recorded set of distances, and determining from the comparison the position of the substrate.