The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
May. 24, 2005
Jun Mochizuki, Nirasaki, JP;
Hisatomi Hosaka, Nirasaki, JP;
Jun Mochizuki, Nirasaki, JP;
Hisatomi Hosaka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
It is an object of the present invention to dramatically reduce thermal deformation without using any special material in a multilayer substrate and a probe card. According to the present invention, in a probe card including at least one circuit board connected in an electrically conductive manner to a probe brought into electrical contact with an inspection object, the circuit board includes a base layer and a surface layer stacked on at least an inspection object side surface of the base layer. The surface layer has a higher coefficient of thermal expansion than that of the base layer, and grooves dividing the surface layer into a plurality of areas are provided in the surface layer.