The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Sep. 08, 2008
Jin Yi, Sunnyvale, CA (US);
Jeonghoon OH, San Jose, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Samuel Chu-chiang, San Jose, CA (US);
Jin Yi, Sunnyvale, CA (US);
Jeonghoon Oh, San Jose, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Samuel Chu-Chiang, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.