The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Aug. 09, 2006
Randhir P S Thakur, San Jose, CA (US);
Stephen Moffatt, Jersey, GB;
Per-ove Hansson, San Jose, CA (US);
Steve Ghanayem, Los Altos, CA (US);
Randhir P S Thakur, San Jose, CA (US);
Stephen Moffatt, Jersey, GB;
Per-Ove Hansson, San Jose, CA (US);
Steve Ghanayem, Los Altos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods for promoting interface bonding energy utilized in SOI technology are provided. In one embodiment, the method for promoting interface bonding energy includes providing a first substrate and a second substrate, wherein the first substrate has a silicon oxide layer formed thereon and a cleavage plane defined therein, performing a dry cleaning process on a surface of the silicon oxide layer and a surface of the second substrate, and bonding the cleaned silicon oxide surface of the first substrate to the cleaned surface of the second substrate.