The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Dec. 05, 2002
Masayuki Toda, Yonezawa-shi, Yamagata-ken 992-0026, JP;
Masaki Kusuhara, Chuo-ku, JP;
Mikio Doi, Chuo-ku, JP;
Masaru Umeda, Chuo-ku, JP;
Mitsuru Fukagawa, Chuo-ku, JP;
Yoichi Kanno, Miyagi-ken, JP;
Osamu Uchisawa, Miyagi-ken, JP;
Kohei Yamamoto, Miyagi-ken, JP;
Toshikatu Meguro, Miyagi-ken, JP;
Masayuki Toda, Yonezawa-shi, Yamagata-ken 992-0026, JP;
Masaki Kusuhara, Chuo-ku, JP;
Mikio Doi, Chuo-ku, JP;
Masaru Umeda, Chuo-ku, JP;
Mitsuru Fukagawa, Chuo-ku, JP;
Yoichi Kanno, Miyagi-ken, JP;
Osamu Uchisawa, Miyagi-ken, JP;
Kohei Yamamoto, Miyagi-ken, JP;
Toshikatu Meguro, Miyagi-ken, JP;
Kabushiki Kaisha Watanabe Shoko, Chuo-Ku, JP;
Other;
Abstract
Disclosed is a vaporizer constituted of a dispersing sectionand a vaporizing section. The dispersing sectioncomprises a gas introduction portfor introducing a carrier gasunder pressure into a gas passage, means for feeding raw material solutionsandto the gas passage, and a gas outletfor delivering the carrier gas containing the raw material solutions to the vaporizing section. The vaporizing sectioncomprises a vaporizing tubehaving one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outletof the dispersing section, and heating means for heating the vaporizing tube. The vaporizing sectionserves to heat and vaporize the raw material solution containing carrier gasdelivered from the dispersing section. The dispersing sectionincludes a dispersing section bodyhaving a cylindrical hollow portion, and a rodhaving an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rodhas a spiral grooveformed in the external periphery closer to the vaporizing section, the rod ibeing inserted into the cylindrical hollow portion.