The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2010
Filed:
Jan. 15, 2008
Clemente Bottini, Marlboro, NY (US);
Ronald D. Fiege, Hopewell Junction, NY (US);
Roger M. Young, Warwick, NY (US);
Shahin Zangooie, Hopewell Junction, NY (US);
Lin Zhou, LaGrangeville, NY (US);
Clemente Bottini, Marlboro, NY (US);
Ronald D. Fiege, Hopewell Junction, NY (US);
Roger M. Young, Warwick, NY (US);
Shahin Zangooie, Hopewell Junction, NY (US);
Lin Zhou, LaGrangeville, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method, system and computer program product for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage are disclosed. A method for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage may include: positioning a calibration target on the stage with multiple different tilts; first determining an angle of incident of the light beam with respect to the calibration target with each tilt using a detector; mapping a response of the detector to a determined angle of incidence; and second determining the angle of incidence with respect to the workpiece based on a result of the mapping.