The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2010
Filed:
Jun. 22, 2005
Katsuhiko Murakami, Sagamihara, JP;
Katsuhiko Murakami, Sagamihara, JP;
Nikon Corporation, , JP;
Abstract
A liquid in which fine solid Sn particles are dispersed in a resin is accommodated inside the heated tank. The resin pressurized by a pressurizing pump is conducted to a nozzle, so that a liquid-form resin is caused to jet from the tip end of the nozzlethat is disposed inside a vacuum chamber. The liquid-form resin which is caused to jet from the nozzleassumes a spherical shape as a result of surface tension, and is solidified by being cooled in a vacuum, so that a solid-form targetis formed. A laser introduction windowused for the introduction of laser light is formed in the vacuum chamber, and laser light generated from a laser light sourcedisposed on the outside of the vacuum chamberis focused by a lensand conducted into the vacuum chamber, so that the target is converted into a plasma, thus generating EUV light.