The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Nov. 14, 2006
Oscar Franciscus Jozephus Noordman, Eindhoven, NL;
Henri Johannes Petrus Vink, Delft, NL;
Huibert Visser, Zevenhuizen, NL;
Oscar Franciscus Jozephus Noordman, Eindhoven, NL;
Henri Johannes Petrus Vink, Delft, NL;
Huibert Visser, Zevenhuizen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.