The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Jun. 10, 2008
Sean R. Mclaughlin, Severn, MD (US);
Narsingh Bahadur Singh, Ellicott City, MD (US);
Brian Wagner, Baltimore, MD (US);
Andre Berghmans, Owing Mills, MD (US);
David J. Knuteson, Ellicott City, MD (US);
David Kahler, Arbutus, MD (US);
Anthony A. Margarella, Columbia, MD (US);
Sean R. McLaughlin, Severn, MD (US);
Narsingh Bahadur Singh, Ellicott City, MD (US);
Brian Wagner, Baltimore, MD (US);
Andre Berghmans, Owing Mills, MD (US);
David J. Knuteson, Ellicott City, MD (US);
David Kahler, Arbutus, MD (US);
Anthony A. Margarella, Columbia, MD (US);
Northrop Grumman Systems Corporation, Los Angeles, CA (US);
Abstract
A process is provided for fabricating a semiconductor device having a germanium nanofilm layer that is selectively deposited on a silicon substrate in discrete regions or patterns. A semiconductor device is also provided having a germanium film layer that is disposed in desired regions or having desired patterns that can be prepared in the absence of etching and patterning the germanium film layer. A process is also provided for preparing a semiconductor device having a silicon substrate having one conductivity type and a germanium nanofilm layer of a different conductivity type. Semiconductor devices are provided having selectively grown germanium nanofilm layer, such as diodes including light emitting diodes, photodetectors, and like. The method can also be used to make advanced semiconductor devices such as CMOS devices, MOSFET devices, and the like.