The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2010

Filed:

Dec. 01, 2006
Applicants:

Sergey Lopatin, Morgan Hill, CA (US);

John O. Dukovic, Palo Alto, CA (US);

David Eaglesham, Livermore, CA (US);

Nicolay Y. Kovarsky, Sunnyvale, CA (US);

Robert Bachrach, Burlingame, CA (US);

John Busch, San Jose, CA (US);

Charles Gay, Westlake Village, CA (US);

Inventors:

Sergey Lopatin, Morgan Hill, CA (US);

John O. Dukovic, Palo Alto, CA (US);

David Eaglesham, Livermore, CA (US);

Nicolay Y. Kovarsky, Sunnyvale, CA (US);

Robert Bachrach, Burlingame, CA (US);

John Busch, San Jose, CA (US);

Charles Gay, Westlake Village, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

Embodiments of the invention contemplate the formation of a low cost solar cell using a novel electroplating apparatus and method to form a metal contact structure having metal lines formed using an electrochemical plating process. The apparatus and methods described herein remove the need to perform the often costly processing steps of performing a mask preparation and formation steps, such as screen printing, lithographic steps and inkjet printing steps, to form a contact structure. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper. Embodiments of the invention may provide an apparatus and method of forming a solar cell device that utilizes a reusable masking device during one or more electrochemical deposition steps.


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