The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Oct. 10, 2008
Applicants:
Paul A. Zimmerman, Cedar Creek, TX (US);
Chris K. Van Peski, Cedar Creek, TX (US);
Inventors:
Paul A. Zimmerman, Cedar Creek, TX (US);
Chris K. Van Peski, Cedar Creek, TX (US);
Assignee:
Sematech Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates generally to the fields of semiconductor lithography. More particularly, it concerns methods, compositions, and apparatuses relating to 157 nm and 193 nm soft pellicles and the use of perfluorinated polymers in the creation of pellicles.
Zimmerman, Paul. (2010). Method for making soft pellicles (U.S. Patent No. 7732120). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7732120
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile